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The miniaturization and performance improvement in semiconductor devices and
integrated circuits (ICs) are expected to continue through leveraging of nanotechnologies and
nanomaterials. This evolution should accelerate the System-on-a-Chip (SoC) trend, i.e., singlechip
integration of multifunctional, mixed-signal electronic components, toward realizing
embedded nanoelectronic systems. In parallel with advances in electronics, we are witnessing
the rise of micro-electro-mechanical systems (MEMS), with rapidly growing commercial
opportunities and markets extending to a broader range of industrial sectors on a global scale.
The emergence of MEMS is primarily attributed to the establishment of sophisticated IC
manufacturing techniques and processes that served as a foundation for realizing many
innovative silicon-based micromachining technologies. Advances in this area have brought
about a revolution in mechanical engineering, enabling the miniaturization and system-level
integration of mechanical structures and devices with ICs on a chip for MEMS fabrication.
With miniaturized sensors and actuators, MEMS provide us with the ability to interact with
micro-scale environments with non-electrical/-electronic parameters, found in the
mechanical, optical, chemical, biological, and other domains. This exceptional ability has led
to their application in fields ranging from implantable medical sensors to video game
controllers. There is no doubt that continued development of MEMS and microsystems with
electromechanical functionalities will extend their contribution to society, in parallel with
the evolution of IC technologies.
This book discusses key aspects of these technology areas, organized in twenty-seven
chapters that present the latest research developments in micro electronic and mechanical
systems. The book addresses a wide range of fundamental and practical issues related to
MEMS, advanced me tal-oxide-semiconductor (MOS) and complementary MOS (CMOS)
devices, SoC technology, integrated circuit testing and verification, and other important topics
in the field. Several chapters cover state-of-the-art microfabrication techniques and materials as
enabling technologies for the microsystems. Reliability issues concerning both electronic and
mechanical aspects of these devices and systems are also addressed in various chapters.
This book is the result of contributions from many researchers worldwide. I would like
to thank the authors for their kind cooperation and efforts to provide their most up-to-date
research results. A special thanks goes to the IN-TECH team for their dedicated work in
making this book possible.